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China makes progress in 3-nm chips without advanced lithography tools

South China Morning Post 19 September 2026 6h ago
China makes progress in 3-nm chips without advanced lithography tools
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Chinese researchers have made early strides in pushing semiconductor processing nodes below 3-nm using older lithography technology, as more advanced extreme ultraviolet lithography (EUV) tools from ASML remain blocked under US sanctions. The breakthrough marks the latest progress in China’s drive to chart an alternative path to advanced chipmaking amid US export restrictions. Under current export
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